光發射譜對CrTiAlN涂層性能的影響

光發射譜對CrTiAlN涂層性能的影響Effects of OEM on the properties of CrTiAlN coatings

在不同光發射譜(OEM)條件下，采用閉合場非平衡磁控濺射技術(CFUBMSIP)在SDC99冷作模具鋼表面沉積CrTiAlN涂層，采用X射線衍射儀(XRD)、顯微硬度儀、原位納米力學測試系統和銷盤摩擦磨損試驗機(POD)測試分析涂層的相結構、表面硬度以及耐磨損性能。結果表明：各條件下制備的CrTiAlN涂層均為FCC結構，且在(200)晶面擇優取向；光發射譜值為65時，制備的CrTiAlN涂層具有較高的表面承載能力以及膜基結合力，納米硬度和彈性模量分別為22.7 GPa和276.4 GPa；OEM65制備的CrTiAlN涂層較OEM70、OEM80制備的CrTiAlN涂層具有更低的摩擦因數和磨損率，表現出更佳的摩擦磨損性能。

Under different conditions of optical emission monitor (OEM), the CrTiAlN coatings were deposited on cold-work die steel SDC99 by closed-field unbalanced magnetron sputtering ion plating (CFUBMSIP) technique. The microstructural, mechanical and tribological properties of coatings were characterized by means of X-ray diffractometry (XRD), microhardness tester, nano indenter test system and pin-on-disc (POD) tribometer. The experimental results show that all of CrTiAlN coatings exhibit FCC crystal structure with (200) preferred orientation. Compared to the coatings deposited under OEM values of 65 and 80, CrTiAlN coatings prepare under OEM value of 65, which shows higher bearing capacity and adhesive force between the coating and the substrate, and the nanohardness and elastic modulus are 22.7 GPa and 276.4 GPa, respectively, as well as a lower friction coefficient and wear rate.

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