Mo含量對CrMoAlN薄膜微觀結構和摩擦磨損性能的影響

Mo含量對CrMoAlN薄膜微觀結構和摩擦磨損性能的影響EFFECTS OF Mo CONTENT ON THE ICROSTRUCTURE AND TRIBOLOGICAL PROPERTIES OF CrMoAlN FILMS

采用非平衡磁控濺射離子鍍技術在 M2 工具鋼和單晶 Si 表面沉積多元 CrMoAlN 納米多層薄膜. 利用 EDS, SEM, XRD, XPS, 納米壓痕儀和銷盤磨損試驗儀研究 Mo 含量對CrMoAlN薄膜成分、表面和截面形貌、相結構、化學價態、顯微硬度和摩擦性能的影響. 結果表明, 不同 Mo 含量的 CrMoAlN 薄膜均為 fcc 結構, Mo 代替了 CrAlN 晶格中部分 Cr 或Al 的位置, 形成了以 fcc-CrN 相為基礎的 CrMoAlN 置換固溶體. 隨著 Mo 含量提高, CrMoAlN 薄膜表面顆粒尺寸明顯減小, 截面柱狀晶結構逐漸消失. CrMoAlN 薄膜的顯微硬度和彈性模量隨著 Mo 含量的增加而提高, 摩擦系數和磨損率隨著 Mo 含量的提高而降低. Mo含量為19.47% (原子分數)時, 顯微硬度與彈性模量均達到最大值29.70和427.53 GPa, 摩擦系數和磨損率達到最小值 0.271和 1.2×10-16 m3/(N?m).

In recent decades, CrAlN coatings have been widely used for cutting tools due to their high hardness, good wear resistance, especially excellent thermal stability and oxidation resistance. However, the rapid development in high speeds and dry cutting applications demands further improvement in hardness and wear properties of CrAlN coatings. Mo nitrides coatings are commonly used as protective surface layers against wear and corrosion. The combination of CrAlN and Mo may lead to the development of new composite coatings with superior wear properties. In this study, the CrMoAlN multilayer coatings with different Mo contents were deposited on M2 tool steel and silicon wafers substrates by closed-field unbalanced magnetron sputtering ion plating (CFUMSIP) technique in a gas mixture of Ar+N2. The chemical composition, surface and cross sectional morphologies, microstructure, mechanical and tribological properties of coatings were studied by EDS, SEM, XRD, XPS, nano-indentation and pin-on-disk tribometer, respectively. The results indicate that the CrMoAlN coatings exhibit fcc structure. Mo atoms substitute Cr and/or Al atoms in CrAlN lattice forming the solid solution CrMoAlN coatings. The surface and cross-sectional morphologies of the CrMoAlN coatings show that the grain sizes and the column widths decrease with the increasing of Mo content. Nano-indentation result reveals a promoted hardness and elastic modulus of the CrMoAlN coatings with enhanced Mo content from 0 to 19.47% (atomic fraction) due to the solid solution strengthening and grain size diminishment. A maximum hardness and elastic modulus of the coatings are found to be 29.70 and 427.53 GPa when the Mo content reached to 19.47%. The average friction coefficient and wear rate were observed to decrease with the increase of Mo content and the lowest values were 0.271 and 1.2×10-16 m3/(N?m), respectively, at 19.47%Mo.

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